1. In addition to 2D RTR inspection, 3D inspection is also possible with one device
2. High-speed imaging using a laser light source and a high-speed camera (3D)
3. Efficient automatic inspection(3D) by original measurement point extraction algorithm
4. Customized design and functions by customer’s needs
Purpose
Specification
Work type
Roll
Inspection side
Single side
Inspection resolution
2D: 3um/pixel, 3D: 1um/pixel (Height resolution)
Product size
260mm
Minimum defect size
L/S=15/15um
Camera
2D: 18k TDI Line scan camera, 3D: 2MP area camera
Illuminator
High brightness LED light source (Long life time)
Defect items
2D: Open/Short/potrusion/Nick/copper resideue/foreign material/pin-hole etc.
3D: Sheet warpage, Step etc,